Thermocouple Ionization Composite Vacuum Gauge

The ZDF-I series thermocouple/ionization composite vacuum gauge is based on the combination of low vacuum measurement thermocouple units (ZJ-53/54D thermocouple gauge) and high vacuum measurement ionization units (ZJ-27 ionization gauge) technology to achieve continuous measurement and control in the range of 4×1024 \times 10^24×102 to 1×10−51 \times 10^{-5}1×10−5 Pa. Therefore, this vacuum gauge series possesses all the technical parameters and performance characteristics of thermocouple vacuum gauges and ionization vacuum gauges, while also adding new functions. This series of vacuum gauges has two operating modes: manual mode and automatic mode. In manual mode, it operates as an independent thermocouple vacuum gauge and ionization vacuum gauge. In automatic mode, the thermocouple unit first enters the measurement state. When the vacuum measured by the thermocouple unit exceeds the level at which the ionization gauge can be activated, the ionization gauge filament is automatically lit (activated) and enters the high vacuum measurement state, achieving automatic continuous measurement from low to high vacuum. Additionally, an external (PLC) on/off function for the ionization gauge has been added to enable the ionization gauge to operate in the best vacuum environment, maximizing the lifespan of the ionization gauge. Some models utilize switching power supplies and switch-mode DC power to drive the ionization gauge filament emission circuit, achieving a highly integrated design without a power frequency transformer. This design achieves a gentle preheating start-up of the ionization gauge filament in the cold state, overcoming the cold-start overshoot phenomenon and extending the lifespan of the gauge tube. It also realizes a broad AC power supply adaptability (AC/90V ~260V) and a wide cable length adaptability (3-30 meters). This is currently an innovative ionization gauge filament drive stability technology. To accommodate the automation of vacuum equipment, it integrates powerful relay contact control, serial communication, and vacuum analog expansion functions. It is particularly suitable for vacuum application equipment with an ultimate vacuum level of 10−310^{-3}10−3 to 10−410^{-4}10−4 Pa and an operating vacuum level of 10−210^{-2}10−2 to 10−310^{-3}10−3 Pa, for measurement and control from low to high vacuum.

Technical Parameters:

• Gauge Model:      ZJ-53/54D thermocouple gauge, ZJ-27 ionization gauge

• Measurement Range: Continuous measurement (automatic mode) 4×1024 \times 10^24×102      to 1×10−51 \times 10^{-5}1×10−5 Pa

• Independent measurement (manual mode)       thermocouple unit 4×1024 \times 10^24×102 to 1×10−11 \times 10^{-1}1×10−1       Pa; ionization unit 555 to 1×10−51 \times 10^{-5}1×10−5 Pa

• Control Range:

• Thermocouple unit 1.0×1021.0 \times       10^21.0×102 to 5×10−15 \times 10^{-1}5×10−1 Pa

• Ionization unit 1×1001 \times 10^01×100 to       1×10−41 \times 10^{-4}1×10−4 Pa

• Control Channels: 4 channels, expandable to 4 or 8 channels

• Control Accuracy: ±1%

• Control Method: Relay      contact output, load capacity AC220V/3A (or DC28V/3A) non-inductive load

• Degassing Method: Joule degassing

• Instrument Sampling Time: 1 second

• Power Supply:      90-260V/50Hz or 220V±10% 50Hz

• Power Consumption: 55W

• Weight: 6Kg/5Kg/4Kg      (depending on chassis size)

• Chassis Size:      240×88×280 or 480×88×280

• 265×119×280 or 480×119×280 (width × height       × depth)

Performance Characteristics:

• LED green screen digital display

• Wide measurement range

• Fast response speed

• Microprocessor correction of gauge non-linearity, reducing measurement      errors

• Precision vacuum signal amplification circuit, stable zero and      full-scale

• Wide stable emission circuit, adaptive adjustment of stable      ionization gauge emission current

• Full-range automatic switching, no manual gear shifting required

• Over-range automatic protection, preventing damage to the gauge      due to sudden atmospheric exposure

• Photoelectric isolation, digital filtering, excellent      anti-interference capability, stable and reliable vacuum measurement

• Functional and modular design

• Point control or area control, arbitrary setting of upper and      lower limit intervals

• Control point power failure (power loss) protection and memory      function

• Simplified function buttons, very simple operation, no gauge or      instrument damage due to operational errors

• PVC color panel, elegant appearance