CY-ZJ-1P Piezoresistive Vacuum Gauge Tube

This type of gauge tube uses a high-quality diffused silicon pressure sensor as the pressure-sensitive element, featuring various standard or non-standard tube packaging structures. The diffused silicon chip inside the sensor is encapsulated by a diaphragm and chamber made of stainless steel 316L. Less than 0.5 cc of silicone oil is filled inside the chamber as a transmission medium. The sensor's unique temperature compensation resistor circuit on a hybrid ceramic substrate provides temperature compensation from 0 to 80°C, controlling the temperature error of zero and full scale within ±0.5%. The specially developed dedicated circuit board ensures stable and reliable performance and a compact design.

Main Technical Parameters:

1.Measurement Range:

50 Pa to 50 kPa

100 Pa to 100 kPa

150 Pa to 150 kPa

200 Pa to 200 kPa

2.Sensitive Element Type: Diffused silicon pressure sensor,

3.Dispersion: ±0.15% (non-linearity + hysteresis + repeatability)

4.Operating Temperature Range: -40 to +80°C

5.Long-term Stability: ±0.3% full scale/year

6.Tube Sealing Material: Fluororubber

7.Allowable Overpressure Range: 2.0×105Pa

8.Vacuum Connection Types and Baking Temperature:

Φ15.5±0.1 Straight Tube

KF10/16 Quick-release Flange

KF25 Quick-release Flange

KF40 Quick-release Flange

M20×1.5 Thread

NPT1/8 Thread

VCR1/8 Connector

Φ6±0.1 Straight Tube

Φ6.35±0.05 Straight Tube