Turbomolecular pumping station

Turbomolecular pumping station is a system consisting of multiple vacuum devices and related components used to create, maintain and monitor a vacuum environment. Common components of a vacuum unit include:

Pumping device: Mechanical pump (such as a rotary vane pump or a sliding vane pump): used for primary pumping to achieve a medium vacuum degree. Molecular pump (such as a turbomolecular pump or an ion pump): used for further pumping to achieve a high vacuum or ultra-high vacuum degree.

Vacuum valve: Isolation valve: used to isolate different parts of the pump and system. Regulating valve: used to control gas flow and adjust system pressure.

Vacuum measuring instrument: Pressure sensor: used to monitor the vacuum degree in the system in real time (such as a thermocouple gauge, a magnetic sensor). Vacuum gauge: used to measure and record vacuum pressure.

Gas handling system: Gas exhaust device: discharges the extracted gas to the environment or a processing system. Condenser or trap: used to capture and condense the gas or vapor generated during the pumping process.

Cooling system: Cooling device (such as a water-cooled or air-cooled system): used to maintain the operating temperature of the pump and system.

Control system: Control panel: used to operate and monitor the entire vacuum unit, including pump speed, pressure control and data logging.

Connection accessories: Pipes and flanges: used to connect different equipment and components to ensure the sealing and stability of the system. Vacuum units are widely used in semiconductor manufacturing, material processing, vacuum coating, scientific research and other fields, requiring efficient and reliable vacuum environments to meet different process requirements.

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Compound molecular pump: