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Magnetic Field Simulation and Structural Design of Cylindrical Magnetron Sputtering Targets

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Research on the Insulating Properties of Magnetron Sputtered Silicon Oxide and Silicon Oxide/Silicon Nitride/Silicon Oxide Films

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Research on Thin Film Growth and Simulation Based on Magnetron Sputtering Technology

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The Development of Magnetron Sputtering and Discussion on Process Parameters

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magnetron sputtered silicon dioxide (SiO₂) films and silicon dioxide/silicon nitride/silicon dioxide (SiO₂/Si₃N₄/SiO₂, abbreviated as ONO) films

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Design and Performance Analysis of Vacuum System for Sputtering Coating Monomer Machine

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