Export Six-source evaporation coater is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities
The coating equipment is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities.
Features
1. High efficiency coating: resistance thermal evaporation technology, high deposition rate.
2. Multi-functional applications: Support a variety of evaporating materials and substrates, suitable for film deposition of different materials.
3. Intelligent control: Equipped with advanced control system to achieve accurate process parameter control.
4. Modular design: easy to maintain and upgrade, can be customized according to the needs of various functional modules.
5. Environmentally friendly: Low energy design to reduce the impact on the environment.
6. Glove box integrated machine: Can be connected to glove box to provide a clean operating environment for samples.
Purchase information
If you are interested in our evaporation coater, please contact us for more information.
Tel:138 3857 9492
Email:carol@cysitech.com
Contact:Carol Xu
Wechat:15290599353
WhatsApp/Skype: 13838579492
Technical parameters
Item | Details | |
Product name | Six source evaporation coater with glove box | |
Model | CY-EVH400-VI-SS-STX | |
Vacuum chamber | Chamber material | High-quality 304 stainless steel D-shaped vacuum chamber, the surface is polished |
Opening method | The front and rear double doors, and the rear door adopts a hinged square door, which is convenient for cleaning the vacuum chamber, internal debugging, maintenance and pick-and-place samples; The front door adopts horizontal pull square door | |
Observation window | The front and rear doors are equipped with 100mm observation windows, equipped with magnetic baffles to prevent pollution. | |
Source interfaces | 2 sets of metal source interface, 4 sets of organic source interface | |
Sample holder | Size | Round tray for 8 pieces of 20×20mm substrates at a time (other dimensions can be customized) |
Rotating speed | 0~30rpmcontinuously adjustable | |
Lifting | Electric lifting, substrate and evaporation source spacing 200-300mm continuously adjustable through the touch screen | |
Substrate baffle | Electronic pneumatic baffle | |
Metal/Organic Source | Metal source | 2 sets, 2 sets of water-cooled copper electrodes, compatible with evaporation boat, 2KW DC constant current power supply, power to meet the common metal and metal oxide evaporation, equipped with pneumatic baffle |
Organic source | 4 sets, exclusive organic evaporation boat, high precision temperature control power supply, temperature range is room temperature -500℃, temperature control accuracy ±1℃, equipped with pneumatic baffle | |
Baffle | The evaporation source is independent from each other, and the baffle is separated to avoid cross contamination | |
Vacuum measurement | Composite vacuum gauge, resistance gauge + ionization gauge, measuring range: 105-10-5Pa | |
Vacuum acquisition | Backing pump | Pumping speed 4.4L/s |
Molecular pump | Pumping speed 1200L/s | |
Film thickness measurement | Standard CYKY quartz crystal film thickness monitor (optional imported brand, with extra charge) | |
3 sets of CF35 water-cooled film thickness probe | ||
Control system | CYKY self-developed professional control system, PLC control, with touch screen | |
Glove box | Type | Two-section four-station glove box |
Single section cavity size | L1200* W750* H900mm (other sizes can be customized) | |
Gloves | 4 pieces | |
Large antechamber | Inner diameter 360mm, length 600mm | |
Small antechamber | Inner diameter 150mm, length 300mm | |
Overall size | L3200*W1000*H1900mm | |
Packing size | L3400*W1200*H2250mm | |
Packing weight | 1600KG |
Main parts:
Part name | Description |
Main unit | Can connect to the glove box |
Water chiller | Circulating water cooling |
Air compressor | Working on the pneumatic baffle valves |
Molecular pump group | Providing a high vacuum environment, eliminates impurities in the cavity, and effectively improves the quality of film |
Glove box | Providing a pure operating environment for the sample and can be customized according to the actual needs |
Accessories | Provided according to the specific configuration such as the quartz crystal, clamp, bellows, water pipes and so on |
Manual | Paper English/Chinese manual or electronic version |
Application
· Electronics and communication technology: provides high vacuum environment, supports precision manufacturing of electronic devices.
· Material science: preparation of various cemented carbide, ceramics and other functional materials.
· Optical coating field: preparation of transmission reflection and green light optical films, to meet the needs of precision manufacturing of optical devices.
· Microcrystalline silicon and other solar cell materials: to support the synthesis and performance research of solar cell materials.
· Aerospace field: preparation of high strength, high temperature anti-corrosion coatings required at high temperature, and high pressure.
Biomedical field: Preparation of medical metal, bioceramic artificial joint and other medical devices.
Application Case
"Preparation of flexible display by evaporating polymer"
Evaporating polymers to prepare flexible displays is a complex and precise process that requires special techniques and materials to ensure the quality and performance of the final product. Here is an overview of the process for preparing a flexible display in a glove box using evaporation technology:
Materials and equipment preparation
Polymer materials:
1. Choose polymers with good optical, electrical, and mechanical properties, such as polyimide (PI), polyester (PET), or organic semiconductor polymers.
Glove box and evaporation coater:
1. The glove box must be kept in an oxygen-free and water-free environment.
2. Evaporation coating instrument should be equipped with high-precision temperature control system and thickness monitoring system.
Substrate material:
1. Flexible transparent substrates are usually used, such as polyimide film or mylar film.
2. Clean and dry the substrate in advance.
Preparation procedure
Substrate treatment:
1. Clean the substrate, remove surface impurities, and plasma treatment if necessary to improve adhesion.
2. Deposit a conductive layer on the substrate, such as indium tin oxide (ITO) or other transparent conductive film.
Evaporation process:
1. Place the polymer material in the evaporation source.
2. Use a high vacuum pump to vacuum to 10^-6 Torr or lower to ensure a good coating environment.
3. Slowly heat the polymer and control the evaporation rate to obtain a uniform film.
4. Control patterned deposition by rotating substrate or using mask.
Multi-layer structure:
1. If a multi-layer structure is required, such as an organic light-emitting diode (OLED) or organic photovoltaic (OPV), repeat the evaporation process to deposit multiple functional layers.
2. After each layer is deposited, annealing or other heat treatment may be required to improve interlayer adhesion and performance.
Package:
1. After the deposition of all layers, the packaging process is carried out to protect the active layer of the flexible display, usually using flexible transparent packaging materials.
Post-processing and testing
Performance test:
1. Test the optical, electrical and mechanical properties of flexible displays, including transparency, electrical conductivity, bending durability, etc.
2. Perform reliability tests, such as temperature, humidity, bending cycle, etc.
Defect detection and repair:
3. Use microscopy or other detection methods to find defects in the membrane layer.
4. If necessary, local repair by laser repair or other processes.
Matters needing attention
Uniformity and repeatability: strictly control the process parameters to ensure the uniformity of the film and the consistency of production.
Material selection: Select the right polymer and conductive material for the application to achieve the desired properties.
Environmental control: Keep the glove box clean and oxygen-free to avoid contamination and oxidation.
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