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Six source evaporation coater with glove box for Preparation of flexible displaySix source evaporation coater with glove box for Preparation of flexible displaySix source evaporation coater with glove box for Preparation of flexible displaySix source evaporation coater with glove box for Preparation of flexible display

Six source evaporation coater with glove box for Preparation of flexible display

    Export Six-source evaporation coater is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities

The coating equipment is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities.

Features

1. High efficiency coating: resistance thermal evaporation technology, high deposition rate.

2. Multi-functional applications: Support a variety of evaporating materials and substrates, suitable for film deposition of different materials.

3. Intelligent control: Equipped with advanced control system to achieve accurate process parameter control.

4. Modular design: easy to maintain and upgrade, can be customized according to the needs of various functional modules.

5. Environmentally friendly: Low energy design to reduce the impact on the environment.

6. Glove box integrated machine: Can be connected to glove box to provide a clean operating environment for samples.

Purchase information

If you are interested in our evaporation coater, please contact us for more information.

  • Tel138 3857 9492

  • Emailcarol@cysitech.com

  • ContactCarol Xu

  • Wechat15290599353

  • WhatsApp/Skype: 13838579492

Technical parameters

Item

Details

Product name

Six source evaporation   coater with glove box

Model

CY-EVH400-VI-SS-STX

Vacuum chamber

Chamber material

High-quality 304 stainless   steel D-shaped vacuum chamber, the surface is polished

Opening method

The front and rear double   doors, and the rear door adopts a hinged square door, which is convenient for   cleaning the vacuum chamber, internal debugging, maintenance and   pick-and-place samples;

The front door adopts   horizontal pull square door

Observation window

The front and rear doors   are equipped with 100mm observation windows, equipped with magnetic baffles   to prevent pollution.

Source interfaces

2 sets of metal source   interface, 4 sets of organic source interface

Sample holder

Size

Round tray for 8 pieces of   20×20mm substrates at a time (other dimensions can be customized)

Rotating speed

0~30rpmcontinuously   adjustable

Lifting

Electric lifting,   substrate and evaporation source spacing 200-300mm continuously adjustable   through the touch screen

Substrate baffle

Electronic pneumatic   baffle

Metal/Organic Source

Metal source

2 sets, 2 sets of   water-cooled copper electrodes, compatible with evaporation boat, 2KW DC   constant current power supply, power to meet the common metal and metal oxide   evaporation, equipped with pneumatic baffle

Organic source

4 sets, exclusive organic   evaporation boat, high precision temperature control power supply,   temperature range is room temperature -500℃, temperature control accuracy   ±1℃, equipped with pneumatic baffle

Baffle

The evaporation source is   independent from each other, and the baffle is separated to avoid cross   contamination

Vacuum measurement

Composite vacuum gauge,   resistance gauge + ionization gauge, measuring range: 105-10-5Pa

Vacuum acquisition

Backing pump

Pumping speed 4.4L/s

Molecular pump

Pumping speed 1200L/s

Film thickness measurement

Standard CYKY quartz   crystal film thickness monitor (optional imported brand, with extra charge)

3 sets of CF35   water-cooled film thickness probe

Control system

CYKY self-developed   professional control system, PLC control, with touch screen

Glove box

Type

Two-section four-station   glove box

Single section cavity size

L1200* W750* H900mm (other   sizes can be customized)

Gloves

4 pieces

Large antechamber

Inner diameter 360mm,   length 600mm

Small   antechamber

Inner   diameter 150mm, length 300mm

Overall size

L3200*W1000*H1900mm

Packing size

L3400*W1200*H2250mm

Packing weight

1600KG

 

Main parts

Part name

Description

Main unit

Can connect to the glove box

Water chiller

Circulating water cooling

Air compressor

Working on the pneumatic   baffle valves

Molecular pump group

Providing a high vacuum   environment, eliminates impurities in the cavity, and effectively improves   the quality of film

Glove box

Providing a pure operating   environment for the sample and can be customized according to the actual   needs

Accessories

Provided according to the   specific configuration such as the quartz crystal, clamp, bellows, water   pipes and so on

Manual

Paper English/Chinese manual   or electronic version

 

Application

· Electronics and communication technology: ‌provides high vacuum environment, supports precision manufacturing of electronic devices. ‌

· Material science: ‌preparation of various cemented carbide, ceramics and other functional materials. ‌

· Optical coating field: preparation of transmission reflection and green light optical films,‌ to meet the needs of precision manufacturing of optical devices. ‌

· Microcrystalline silicon and other solar cell materials: ‌to support the synthesis and performance research of solar cell materials. ‌

· Aerospace field: preparation of high strength, ‌high temperature anti-corrosion coatings required at high temperature, ‌and high pressure. ‌

Biomedical field: Preparation of medical metal, ‌bioceramic artificial joint and other medical devices.

 

Application Case

"Preparation of flexible display by evaporating polymer"

Evaporating polymers to prepare flexible displays is a complex and precise process that requires special techniques and materials to ensure the quality and performance of the final product. Here is an overview of the process for preparing a flexible display in a glove box using evaporation technology:

Materials and equipment preparation

Polymer materials:

1. Choose polymers with good optical, electrical, and mechanical properties, such as polyimide (PI), polyester (PET), or organic semiconductor polymers.

Glove box and evaporation coater:

1. The glove box must be kept in an oxygen-free and water-free environment.

2. Evaporation coating instrument should be equipped with high-precision temperature control system and thickness monitoring system.

Substrate material:

1. Flexible transparent substrates are usually used, such as polyimide film or mylar film.

2. Clean and dry the substrate in advance.

Preparation procedure

Substrate treatment:

1. Clean the substrate, remove surface impurities, and plasma treatment if necessary to improve adhesion.

2. Deposit a conductive layer on the substrate, such as indium tin oxide (ITO) or other transparent conductive film.

Evaporation process:

1. Place the polymer material in the evaporation source.

2. Use a high vacuum pump to vacuum to 10^-6 Torr or lower to ensure a good coating environment.

3. Slowly heat the polymer and control the evaporation rate to obtain a uniform film.

4. Control patterned deposition by rotating substrate or using mask.

Multi-layer structure:

1. If a multi-layer structure is required, such as an organic light-emitting diode (OLED) or organic photovoltaic (OPV), repeat the evaporation process to deposit multiple functional layers.

2. After each layer is deposited, annealing or other heat treatment may be required to improve interlayer adhesion and performance.

Package:

1. After the deposition of all layers, the packaging process is carried out to protect the active layer of the flexible display, usually using flexible transparent packaging materials.

Post-processing and testing

Performance test:

1. Test the optical, electrical and mechanical properties of flexible displays, including transparency, electrical conductivity, bending durability, etc.

2. Perform reliability tests, such as temperature, humidity, bending cycle, etc.

Defect detection and repair:

3. Use microscopy or other detection methods to find defects in the membrane layer.

4. If necessary, local repair by laser repair or other processes.

Matters needing attention

Uniformity and repeatability: strictly control the process parameters to ensure the uniformity of the film and the consistency of production.

Material selection: Select the right polymer and conductive material for the application to achieve the desired properties.

Environmental control: Keep the glove box clean and oxygen-free to avoid contamination and oxidation.

 


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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