D type Cavity High vacuum evaporation coater for Au thin film deposition

This equipment is multi-source high vacuum evaporation coater, the equipment adopts the  front door vacuum chamber design, the chamber space is large, the expansibility is strong,  can meet the evaporation coating of multiple large size samples. The chamber is equipped  with an upper sample table, which can select the clamping or cassette type sample mounting  parts according to the user's sample style. The sample table can be rotated, heated and lifted, all operations are integrated through the touch screen control. The vacuum pump group of  the equipment is a two -stage vacuum system, which is composed of a bipolar rotary vane  vacuum pump and a turbomolecular pump, which can provide a clean and oil-free high  vacuum environment for vacuum coating test. The vacuum system contains a complete  pneumatic valve system, the user can through the touch screen for one -click operation to  achieve vacuum extraction, without stopping to take lofting, complete shutdown and other  operations.

The evaporation source of the equipment is two groups, taking tungsten boat evaporation source, water-cooled  copper  electrode,  can  support  the  maximum  300A  large  current, heating temperature up to 1800℃, can achieve a variety of refractory metal evaporation. The equipment adopts  the  integrated  design,  the  cavity  and  the  electric  control  part  are separated  from  each other,  which  realizes  the  separation  of  water  and  electricity,  and effectively ensures the safety of users. The electronic control part uses the combination of touch screen and button panel design, vacuum system, sample table and other auxiliary functions through the touch screen  one -click operation,  electrification  evaporation,  film thickness control through the panel independent operation, as convenient as possible to the user while  avoiding  the  possibility  of  misoperation. The  device  has  perfect  design  and superior performance, and is an essential choice for high-precision evaporation coating test in the laboratory.

Contact us :

If you are interested in our high vacuum evaporation coating equipment, please contact us for more information and quotation.

Tel: 86 159 3625 3205

Email: zerlinda@zztainuo.com

Contact person: Zerlinda

WeChat: 86 159 3625 3205

 Specifications:

Main accessories：

• Application

Metal and dielectric films

Manufacturing of thin film sensors

Optical components

Nano and microelectronics

Application case: Au thin film deposition using 3 source high vacuum evaporation coating machine

•  Experimental materials and equipment

1. Equipment preparation

Vacuum chamber: Make sure the chamber is clean and free of contamination, and all surfaces are free of impurities.

Evaporation source: Use a high-purity gold evaporation source, usually gold wire or gold particles.

Substrate: Prepare the substrate to be coated (such as silicon wafer, glass, etc.), and clean and dry it before use.

Jig and sample stage: Check and adjust to ensure the accurate position of the sample during the evaporation process.

2. Substrate preparation

Cleaning the substrate to remove surface contaminants, commonly used methods include:

Acetone ultrasonic cleaning

Deionized water rinsing

Isopropyl alcohol rinsing

Nitrogen blowing dry

3. Vacuum system

Start the vacuum pump and gradually evacuate to a high vacuum state, usually 10-6Torr or lower.

Make sure there are no leaks in the vacuum system and observe the reading of the vacuum gauge to confirm that the system is stable.

4. Evaporation process

Heating: Gradually heat the evaporation source to start sublimation of gold. Control the heating rate to avoid evaporation too fast and cause uneven particle size.

Film thickness control: Use a quartz crystal monitor or other film thickness gauge to monitor the film thickness in real time. The commonly used evaporation rate is 0.1 - 1 nm/s.

Uniformity: Adjust the rotation or displacement of the sample to ensure uniform film thickness.

5. Cooling and sampling

After the evaporation is completed, gradually cool the evaporation source and chamber.

After the chamber temperature returns to room temperature, slowly vent to normal pressure and remove the substrate.

6. Post-processing and testing

Use a microscope or other test equipment (such as atomic force microscope, scanning electron microscope) to check the uniformity and quality of the film.

Perform electrical or optical performance tests on the film and adjust process parameters as needed.

Notes

Purity and material selection: Select high-purity gold source materials to avoid doping.

Vacuum: Ensure high vacuum during evaporation to reduce the influence of impurity gases.

Temperature control: Precisely control the temperature and heating rate to obtain the desired film properties.