Desktop type open cover single target magnetron sputtering coater for laboratory SEM sample preparation

This device is a single target magnetic control coating instrument, can be used for the preparation of metal film, in the field of electronics, optical field, special ceramic preparation and other fields have applications, also can be laboratory SEM sample preparation.

This set is equipped with a high vacuum stainless steel chamber, and the chamber is equipped with a quartz observation window with a baffle, which is convenient for the observation and record of the  experiment; Cavity design vacuum performance is excellent, compact shape, very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the uniformity of the film and the quality of the film. The whole machine adopts modular design, simple operation logic, intuitive operation interface, easy to get started.

 Product Features:

High efficiency coating: magnetron sputtering technology, high deposition rate, good film uniformity.

Multi-functional application: support a variety of targets and substrates, suitable for film deposition of different materials.

Intelligent control: Equipped with advanced control system to achieve accurate process parameter control.

Modular design: easy to maintain and upgrade, can be customized according to the needs of various functional modules.

Environmentally friendly: Low energy consumption design, reducing the impact on the environment.

Buy Information

If you are interested in our magnetron sputtering coater, please contact us for more information and quotation.

•     Contact number: +8615617875939

•     Email: gordon@zztainuo.com

•     Contact: Gordon Zhang

•     Wechat: 15617875939

•     WhatsApp: +8613592553141

 Magnetron sputtering coater Technical parameters: 

 Main parts: 

 Field of application: 

1. Materials science research 

Functional film preparation: The laboratory can prepare various films with special functions through this equipment, such as metal films, oxide films, nitride films, etc. These films have important application value in material science research, such as for studying the electrical, optical, magnetic and other properties of materials. Nanomaterials research: Desktop type open-cover magnetron sputtering coater can also be used for the preparation and research of nanomaterials, through precise control of coating parameters, can be prepared with nanoscale structure of thin film materials, to provide strong support for the development of nanotechnology. 

2. Electronics industry 

Electronic components manufacturing: In the electronics industry, the equipment can  be used to prepare thin film electrodes and conductive films of electronic components. These thin film electrodes and conductive films have an important impact on the  performance and stability of electronic components.

IC Manufacturing: While the desktop device may not be used directly for large-scale IC production, in a laboratory setting it can be used for research and development of new IC manufacturing processes and materials.

 3. In the optical field 

Optical film preparation: desktop type open-cover magnetron sputtering coater has important applications in optical film preparation, such as the preparation of anti- reflection film, reflection film, polarization film and so on. These optical films are widely used in optical instruments, photographic equipment, lighting equipment and other fields, which can improve the performance and stability of optical components.

 4. Research and teaching 

Scientific research experiment: In the field of scientific research, the equipment is an important tool for laboratory research in materials science, chemistry, physics and other fields. It can help researchers explore new materials, new processes and new methods, and promote the progress of science and technology. 

Teaching demonstration: Because of its compact structure and easy operation, the desktop type open-cap magnetron sputtering coater is also very suitable for teaching demonstration. Through practical operation and observation, students can more intuitively understand the principle and application of coating technology, improve learning interest and practical ability. 

5. Other areas 

Biomedical: In the biomedical field, the device can be used to prepare thin film materials for biomedical devices such as biosensors and biochips. These thin film materials are of great significance for improving the performance and stability of biomedical devices.

Decorative and protective: Although this is not their primary field of application, their potential applications in decorative and protective coatings can also be explored under laboratory conditions.

Application  Case  "Adopted:  Use  of  desktop  type  single  target  magnetron sputtering coater to coat 75*25mm slide with a metal film thickness of 100nm" 

1. Preparation work: 

Clean the slide: Make sure the surface of the 75*25mm slide is clean, flat and free of oil and impurities. You can use solvents such as acetone and isopropyl alcohol for ultrasonic cleaning, then blow dry with nitrogen, and finally put in a vacuum oven to remove water.

Mount the target: Mount the aluminum target on the target rack and make sure it is securely secured. Depending on the equipment requirements, it may be necessary to preheat the target.

Prepare the sample table: Fix the clean slide on the sample table to ensure accurate and stable position. 

2. Check and start the equipment: 

Check the equipment: confirm that the power connection is normal, check whether the vacuum pump, cooling water and other equipment is working normally.

Turn on the cooling system: If the equipment needs cooling water circulation, the cooling system should be turned on in advance to ensure that the equipment is in the appropriate temperature range during the coating process.

 3 .Vacuum: 

Close the vacuum chamber door: After placing the sample stand and target in the vacuum chamber, quickly close the vacuum chamber door. 

Start the vacuum pump: First start the mechanical pump for rough pumping, and reduce the air pressure in the chamber to a lower level (such as below 10Pa). Then open the molecular pump for fine pumping until it reaches the high vacuum state required by the equipment (the general requirement is that the background vacuum degree is above 6.6×10^-4 Pa). 

4. Sputtering coating 

Through the working gas: When the vacuum degree reaches the requirements, through the working gas (usually argon Ar), and by adjusting the gas flow and the valve of the molecular pump, so that the pressure in the chamber is maintained at a constant value.

Pre-sputtering: Turn on the power control switch and adjust the magnetron sputtering power to make the target shine. Pre-sputtering is performed to remove oxides and contaminants from the surface layer of the target, and the pre-sputtering time is generally a few minutes (such as 5 minutes).

Formal sputtering: After the pre-sputtering is complete, adjust the sample table directly above the target or turn on the automatic rotation mode of the sample table to begin the formal sputtering. Adjust parameters such as sputtering time and power according to the desired film thickness (100nm) and the sputtering rate of the equipment. During the sputtering process, it is necessary to monitor the parameters such as air pressure, current and power in real time to ensure the normal operation of the equipment. 

5. End sputtering and subsequent processing 

Turn off sputtering: When the desired film thickness is reached, turn off the power control switch, argon flowmeter and air valve, molecular pump switch, mechanical pump switch and circulating cooling water switch in turn. 

Take out the sample: after the chamber has cooled to a safe temperature (to avoid burns), open the vacuum chamber door and take out the sample. 

Quality testing: Quality testing and performance testing of the coated slide, such as using a microscope, scanning electron microscope and other tools to check whether the surface morphology and structure of the film meet the requirements. 

Matters needing attention 

During the entire operation process, strictly follow the safety operation rules of the equipment to avoid accidents.

Perform regular maintenance and maintenance on the equipment to ensure that it is in good working condition.

Adjust operating parameters and steps according to specific equipment and coating requirements